Distinguished University Professor S.V. Babu Co-Authors 20 th U.S. Patent

Distinguished University Professor / CAMP Director S.V. Babu has co-authored his 20 th U.S. patent (patent number 6,918,820), which relates to compositions and methods for chemical-mechanical polishing. In particular, this invention is a method for removing metals, oxides, and polymers to provide superior surface smoothness of electronic, magnetic, and optical materials during polishing. This method involves removing material from a surface by means of rubbing it with particulate media consisting of particles having a core-shell structure in which a polymeric core is embedded with a shell of inorganic particles. Professor Babu’s other patents are in the general areas of chemical mechanical planarization, applications for diamondlike thin films in imaging and for corrosion resistance, and plasma surface treatment for adhesion enhancement and surface cleaning. These patents are the result of research funded by IBM, Kodak, and Ferro Corporation (all Corporate Sponsors of CAMP).

Distinguished University Professor S.V. Babu Delivers Award Winning Research Paper

Distinguished University Professor/CAMP Director S.V. Babu is one of three presenters chosen to receive monetary awards for research papers delivered during the symposium on “Application of Polymers in Manufacturing of Integrated Circuits” at the American Chemical Society’s 229th National Meeting and Exposition held in San Diego, CA during the month of March.

The winning paper, coauthored by graduate students Udaya B. Patri, Youngki Hong, and Vinay G. Meled and delivered by Professor Babu was titled “Chemical Mechanical Polishing of Polymeric Low-k Dielectric Films: A Brief Review.” This paper reviewed the effect of slurry constituents like slurry chemicals, abrasives and pH on the chemical mechanical polishing (CMP) characteristics of several polymeric low-k films. Low-k dielectric films increase the speed and power-efficiency of next generation high-speed wireless, networking and server products.

The winners were selected based on the quality of the presentation and importance of the subject. “Although the monetary award is small, the recognition by our peers in the American Chemical Society for the research we are doing at Clarkson in CMP and unconventional abrasives, in particular, is very gratifying,” remarked Babu.

Professor Babu’s research interests include CMP of Cu, Ta & SiO 2, CMP for shallow-trench isolation, adhesion enhancement, thin film deposition, laser annealing, and particle-surface interactions. External funding for his research has totaled more than $9 million. The research funds have come from IBM, Kodak, NYACOL Nano Technologies, Intel/SRC, JM Huber, Infotonics Technology Center, the National Science Foundation, the U.S. Department of Defense, NYSERDA, Ebara, St. Gobain, PPG Industries, Rodel, and other organizations.



From left: Professor Egon Matijevic’ (the Victor K. LaMer Chair in Colloid and Surface Science), Dr. Stane Pejovnik (Professor of Materials Science, University of Ljubljana), and Distinguished University Professor /CAMP Director S.V. Babu.

Clarkson University Lectureship Series Begins

The 2005 Clarkson University Lectureship Series began with a presentation by Dr. Stane Pejovnik, Professor of Materials Science, Faculty of Chemistry and Chemical Technology, University of Ljubljana ( Slovenia). Dr. Pejovnik is a renowned leader in materials research and hails from an institution that is world renown for materials research and education.

As the inaugural speaker for the Clarkson University Lectureship Series, Dr. Pejovnik presented a lecture titled “Designing Electrode Properties in Li Ion Batteries.” He also conducted a workshop on curriculum initiatives related to materials science and engineering. These lectures were organized by Professor Egon Matijevic' , the Victor K. LaMer Chair in Colloid and Surface Science.

Nobel Laureate in Chemistry Dr. John B. Fenn speaks at Clarkson. From left: Distinguished University Professor /CAMP Director S.V. Babu, Clarkson University President Anthony Collins, Nobel Laureate Dr. John B. Fenn, and Professor Egon Matijevic’ (the Victor K. LaMer Chair in Colloid and Surface Science)

Nobel Laureate Dr. John Fenn Presents Shipley Distinguished Lectureship at Clarkson

Nobel Laureate Dr. John B. Fenn (Research Professor, Virginia Commonwealth University) presented the Eleventh Shipley Distinguished Lectureship at Clarkson University. His talks titled “Electrospray Wings for Molecular Elephants” and “ Science for Shekels - Salvation or Seduction,”were co-sponsored by the Center for Advanced Materials Processing (CAMP) and the School of Arts and Sciences. Dr. Fenn received the Nobel Prize in Chemistry 2002 for the development of methods for identification and structure analyses of biological macromolecules.